Where am I?
Public Version of Deliverable D3.6 (August 2023) Final Version of KMC Process Models Calibrated with Experiments
Public Deliverable D2.6 (July 2023) Final Version of the Models for Heated Implants, SPER and Silicidation
Public Deliverable D3.5 (June 2023) Final Experimental Results on Epitaxy
Public Deliverable D5.6 (June 2023) Final KMC Models for Defect Formation
Public Deliverable D7.5 (June 2023) Symposium at the E-MRS Spring Meeting
Public Deliverable D6.3 (March 2023) Report on the Toolchains for the Test Applications
Public Deliverable D2.4 (February 2023) Final Experimental Results on Heated Implants and SPER
Public Deliverable D5.5 (February 2023) Final atomistic catalog of chemical reactions relevant for defect formation
Public Deliverable D4.6 (January 2023) Final Experimental Results on Laser Annealing
Public Deliverable D2.5 (December 2022) Final Experimental Results on Silicidation of Si and SiGe Bulk Materials and Nanowires
Public Deliverable D4.7 (December 2022) Complete Model for Alloy Redistribution and Doping, Calibrated with the Second Round of Experiments
Public Deliverable D6.2 (September 2022) Report on the Integration of External KMC/LKMC Tools into the TCAD Toolchain
Public Deliverable D4.5 (July 2022) Report on the First Version of Atomistic Studies and LKMC Models
Public Deliverable D5.1 (July 2022) First Batch of Experimental Results Regarding the Electrical and Structural Characterization of Device Samples
Public Deliverable D2.1 (September 2021) First Batch of Experimental Results on Heated Implants and SPER
Public Deliverable D2.2 (August 2021) Atomistic Catalogue of Events for Calibration of LKMC Dedicated to Silicidation and First Batch of Experimental Results on Silicidation of Si Bulk Materials
Public Deliverable D3.3 (August 2021) First Batch of Experimental Results on Epitaxy
Public Deliverable D4.3 (July 2021) First Round of Experiments on Structural Modifications, Alloy Redistribution to Validate Model Predictions, Experimental Plan for Second Round
Public Deliverable D4.2 (April 2021) Report on the First Round of Optical and Thermal Measurements
Public Deliverable D5.2 (April 2021) Provisional Atomistic Catalogue of Chemical Reactions Relevant for Defect Formation
Public Deliverable D3.1 (July 2020) Review of Experimental and Model State of the Art for Epitaxy of Si and SiGe Films by Chemical Vapor Deposition
Public Deliverable D4.1 (July 2020) Specification Report for Laser Annealing Calibration: Literature Review, Missing Data, Experimental Plan
Public Deliverable D6.1 (May 2020) Device Architectures and Processing of the Test Applications
Public Deliverable D7.1 (February 2020) Set-up of the MUNDFAB Website
Modeling Unconventional Nanoscaled Device FABrication